Description
50NM W FULL CARBON CD PROBE, 5PK DESCRIPTION
TIP SPECIFICATIONS
CANTILEVER SPECIFICATIONS The EBD-CDR probes for 3D reference and hybrid metrology: witha full range of EBD-CDR probes from 130 nm down to 15 nm, this ispushing the limits of 3D-AFM technology for measuring tight dimensionsand extending its capability for future nodes. It brings EBD´skey strength: precise tip orientation, precise control in tip dimensions(length, total diameter, vertical edge height, overhang) and largevolumeproduction to undercut applications. These tips do not have a wearresistance coating – butmade from bulk wear resistance diamond like carbon.
50 nm full carbon CD probe. Low vertical edge height, constant edge radius maintains resolution over tip life. Tip Geometry:
Critical Dimension (Overhang) Tip Height:
10 – 15 Tip Radius (Max):
<10 Tip Set Back (Nom):
15 Tip Set Back( RNG):
5 – 25 Tilt Compensation:
3 Aluminum reflective coating on the backside of the cantilever. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications. Cantilever Material:
0.01 – 0.025Ωcm Antimony (n) doped Si Cantilever Thickness (Nom):
1 – 2 Cantilever Thickness (RNG):
3.0-4.5 Cantilever Geometry:
Rectangular Back Side Coating:
Reflective Aluminum
