Description
DESCRIPTION The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio. Structure: Si wafer with grating in top surface Pattern type: Chessboard like array of square pillars with sharp undercut edges Height:
0.3 – 0.6µm Top square size:
1.2 x 1.2µm Edge radius:
≤10nm Period: 3 ±0.05µm Chip size: 5 x 5 x 0.5mm Effective area: Central square of 3 x 3mm Note: Height and top square dimensions are given for information only (non calibrated values).
CategoryVape, Vape
BrandNot provided
SKUPRD-83AC34D0ACAC
Global identifierNot provided
Identifier typeNot provided
Manufacturer part numberNot provided
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