Description
DESCRIPTION The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects. Structure: Si wafer with SiO2 layer for grating Pattern type: 3-Dimensional array of small squares Height:
20 ±1.5nm Square size:
1.5 ±0.15µm Period: 3 ±0.05µm Chip size: 5 x 5 x 0.5mm Effective area: Central square of 3 x 3mm Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating. The basic step height can vary from the specified one within 10% (example: step height can be 22 ±1.5nm).
CategoryVape, Vape
BrandNot provided
SKUPRD-3541A4947EFD
Global identifierNot provided
Identifier typeNot provided
Manufacturer part numberNot provided
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